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论文类型：会议论文

发表时间：2013-04-17

收录刊物：EI、Scopus

页面范围：285-290

摘要：In this paper exergy analysis is applied on Atomic Layer Deposition (ALD) of Al2O3 thin film to analyze the utilization and losses of exergy in ALD system. The exergies associated with material flow, heat flow, and work flow are calculated. Based on the exergy balance equation, exergy loss is calculated for the ALD Al2O3 process and then exergy efficiency is calculated with a value of 2.72   10-5. According to the result it can be concluded that the utilization of exergy is extremely low in ALD Al2O3 process. This research can be useful for future energy consumption and optimization of ALD system.