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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：大连工学院
学位：硕士
所在单位：物理学院
学科：等离子体物理
联系方式：liuyue@dlut.edu.cn
电子邮箱：liuyue@dlut.edu.cn
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Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure
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论文类型：期刊论文
发表时间：2012-12-01
发表刊物：JOURNAL OF PLASMA PHYSICS
收录刊物：Scopus、SCIE、EI
卷号：78
期号：6
页面范围：673-676
ISSN号：0022-3778
摘要：A one-dimensional fluid model is built to study the effect of radio frequency (RF) on the characteristics of RF nitrogen discharge with induced argon plasma at high pressure. The model is solved by a finite difference method, and the numerical results are obtained. The numerical results show that by modulating driven frequency, the discharge can obtain higher plasma density. Moreover, the discharge is operated in a stable a mode in a range of 100 MHz of driven frequency.