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A Miniature Fiber-Optic Silicon Cantilever-Based Acoustic Sensor Using Ultra-High Speed Spectrum Demodulation
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Date of Publication:2022-10-04

Journal:IEEE SENSORS JOURNAL

Institution:光电工程与仪器科学学院

Volume:21

Issue:18

Page Number:20086-20091

ISSN:1530-437X

Key Words:"Silicon cantilever; fiber-optic acoustic sensor; silicon-on-insulator; absolute cavity length demodulation"

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Gender:Male

Alma Mater:Dalian University of Technology

Degree:Doctoral Degree

School/Department:School of Physics

Discipline:Optical Engineering. Measuring Technology and Instrument

Business Address:厚望楼404

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