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Preparation, structure and properties of TaN and TaC films obtained by ion beam assisted deposition

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发表时间：2022-10-08

发表刊物：NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION B BEAM INTERACTIO

所属单位：物理学院

卷号：127

页面范围：664-668

ISSN号：0168-583X

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