牛方勇

个人信息Personal Information

副教授

博士生导师

硕士生导师

性别:男

毕业院校:大连理工大学

学位:博士

所在单位:机械工程学院

学科:机械制造及其自动化

办公地点:机械工程学院新大楼5031

联系方式:15104053320

电子邮箱:niufangyong@dlut.edu.cn

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飞秒激光烧蚀石英玻璃表面质量分析

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发表时间:2022-10-09

发表刊物:机械工程学报

所属单位:机械工程学院

期号:23

页面范围:194-199

ISSN号:0577-6686

摘要:The influences of polarization state on ablation line width and morphology are investigated based on line experiments of different laser power. The surface ablation experiments of different line overlap rateδ are carried out in the combination of linear ablation optimized parameters. Also, the surface roughness is analyzed by using surface profiler. In addition, the relational expressions of scanning velocity and line overlap rate on the influence of scallop height are established, and then the expressions are calculated. The results show that the ablation line quality of linearly polarized laser is better than the circularly polarized laser, and its line width is greater than that of circularly polarized laser. Whenδ increases from 65% to 90%, the arithmetical mean deviationRa of ablation surface for linearly polarized laser decreases firstly and then increases, and it reaches to a minimum of 1.05μm atδ=80%. But, theRaof circularly polarized laser decreases with the increasing ofδ, and it reaches to a minimum of 1.63μm atδ=90%. The calculated results of roughnessRz are consistent with the experimental results, and it is a kind of linear relation betweenRz andδ. Also, theRzdecreases with the increasing ofδ.

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