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等离子体化学气相沉积微晶硅薄膜的活性粒子诊断

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Leading Scientist:lixiaosong

Supported by:国务院其他部门

Sub-Class of Project:面上项目

Status:结题

Supported by:人力资源与社会保障部

Nature of Project:纵向

Project Approval Number:20080431138

Date of Project Approval:2008-01-01

Scheduled completion time:2010-12-31

Date of Project Initiation:2009-01-01

Date of Project Completion:2010-12-31

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