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等离子体化学气相沉积微晶硅薄膜的活性粒子诊断

Release Time:2016-08-09  Hits:

Leading Scientist: 李小松

Project Source: 国务院其他部门

Sub-Class of Project: 面上项目

Status: 结题

Supported by: Ministry of Human Resources and Social Security

Nature of Project: 纵向

Project Approval Number: 20080431138

Date of Project Approval: 2008-01-01

Scheduled Completion Time: 2010-12-31

Date of Project Initiation: 2009-01-01

Date of Project Completion: 2010-12-31

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