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基于水解反应气相均匀沉积TiO<sub>2</sub>薄膜的方法

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First Author:Zhu Aimin

Disigner of the Invention:Xiaobing Zhu,lixiaosong,Shi Chuan

Application Number:CN201310415632.X

Authorization Date:2013-09-13

Authorization number:CN103498132A

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