Plasma spectroscopy and diagnosis lab
Research Project
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Research Project
壁表面刻蚀与再沉积原位诊断技术研究
Release Time:2016-08-09
Hits:
Leading Scientist:
hongbin ding
Institution:
物理学院
Project Source:
国家科技部
Project Level:
National level
Status:
结题
Supported by:
Ministry of Science and Technology
Nature of Project:
纵向
Project Approval Number:
2013GB109005
Date of Project Approval:
2012-10-24
Scheduled Completion Time:
2017-08-31
Date of Project Initiation:
2013-01-01
Date of Project Completion:
2018-07-06
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