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一种低气压大面积、高密度等离子体产生装置及产生方法
Release time:2019-10-05 Hits:
First Author: hongbin ding
Disigner of the Invention: wangzhiwei,高亮,fengchunlei,Wangqi
Application Number: CN201710569131.5
Authorization Date: 2017-07-13
Authorization number: CN107426908A