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发表时间：2007-01-01

发表刊物：功能材料

期号：1

页面范围：115-118

ISSN号：1001-9731

摘要：Graded diamond-like carbon (DLC) film containing interim layer was deposited successfully on TiNi alloy by microwave electron cyclotron resonant plasma enhanced magnetron sputtering (MW-ECR PEUMS). Visible Raman spectra confirm the amorphous carbon feature of the film and techniques of graded layer affect its structure. Smooth surface morphology of the films was observed by atom force microscope (AFM). The anti-corrosion performances of films were studied elementarily in Troyde's simulated bodily fluid. The results showed the anti-corrosion performance of TiNi alloy is improved by the existence of graded DLC films. Results of differential scanning calorimetry (DSC) prove the temperature of reversible martensite transformation of TiNi alloy remain invariant after surface modification.

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