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Plasma characteristics of direct current enhanced cylindrical inductively coupled plasma source

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Date of Publication:2022-10-08

Journal:Plasma Science and Technology

Volume:20

Issue:6

ISSN No.:1009-0630

Pre One:Frequency dependence of plasma characteristics at different pressures in cylindrical inductively coupled plasma source

Next One:Effects of direct current discharge on the spatial distribution of cylindrical inductively-coupled plasma at different gas pressures

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Associate Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Male

Alma Mater:哈尔滨工业大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:等离子体科学与工程研究中心（新三束3号楼203）

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