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Optimization of discharge antenna turn and modulation of EEPFs and plasma parameters in dual-frequency cylindrical ICP source at different gas pressures

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Date of Publication:2022-10-07

Journal:JOURNAL OF APPLIED PHYSICS

Volume:128

Issue:1

ISSN No.:0021-8979

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Gender:Male

Alma Mater:哈尔滨工业大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:等离子体科学与工程研究中心（新三束3号楼203）

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