Effects of impedance matching network on α-γ mode transition in atmospheric pressure RF discharges
Release Time:2024-09-24 Hits:
Indexed by:Journal Papers
Document Code:395548
Date of Publication:2024-08-01
Journal:JAPANESE JOURNAL OF APPLIED PHYSICS
Volume:63
Issue:8
ISSN:0021-4922
Key Words:GLOW-DISCHARGES; PLASMA



