Temporal evolution of harmonic characteristics in atmospheric pressure pulsed RF discharges
Release Time:2025-10-25 Hits:
Indexed by:Journal Papers
Document Code:584145
Date of Publication:2025-09-22
Journal:PHYSICS OF PLASMAS
Volume:32
Issue:9
ISSN:1070-664X
Key Words:CAPACITIVELY COUPLED PLASMA; DENSITY; FREQUENCY; GENERATION; IMPEDANCE MEASUREMENTS; POWER



