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发表时间：2024-01-01

发表刊物：Materials Today Communications

卷号：40

ISSN号：2352-4928

关键字：Deformation behavior; Dynamics simulation; Gallium arsenide; III-V semiconductors; Maximum forces; Mechanical; Nano-imprinting; Nano pattern; NanoPatterning; Patterning process; Piles; Pile-ups; Pressung; Residual stresses; Semiconducting gallium; Temperature