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[4H-SiC 衬底电化学氧化行为研究]

Release Time:2024-06-17  Hits:

Indexed by: Journal Papers

Document Code: 388524

Date of Publication: 2023-10-19

Journal: Xiandai Huagong/Modern Chemical Industry

Volume: 43

Page Number: 192 - 196

ISSN: 0253-4320

Key Words: breakdown potential; electro-assisted processing; electrochemical oxidation; silicon carbide

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