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4H-SiC衬底电化学氧化行为研究

Release Time:2024-06-17  Hits:

Indexed by: Journal Papers

Document Code: 388524

Date of Publication: 2023-10-31

Journal: 现代化工

Volume: 43

Issue: S2

Page Number: 192-196

ISSN: 0253-4320

Key Words: breakdown potential; electro-assisted processing; electrochemical oxidation; silicon carbide

CN: 11-2172/TQ

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