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4H-SiC衬底电化学氧化行为研究

Release Time:2024-06-17  Hits:

Date of Publication: 2024-05-01

Journal: 现代化工

Volume: 43

Issue: S2

Page Number: 192-196

Key Words: 击穿电位; 电化学氧化; 电辅助加工; 碳化硅

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