Anodic oxidation behaviors of 4H-SiC for guiding electrochemical mechanical polishing
Release Time:2025-11-30 Hits:
Indexed by: Journal Papers
Document Code: 585328
Date of Publication: 2025-12-01
Journal: ELECTROCHIMICA ACTA
Volume: 542
ISSN: 0013-4686
Key Words: ALLOY; BREAKDOWN; DAMAGE; EIS; GROWTH; OXIDE; PITTING CORROSION; SINGLE-CRYSTAL; WAFER