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论文类型：期刊论文

发表时间：2020-03-10

发表刊物：APPLIED OPTICS

收录刊物：SCIE

卷号：59

期号：8

页面范围：2283-2290

ISSN号：1559-128X

摘要：In this paper, a method for measuring the synchronization error of high-precision dual parallel motion stages is presented. The method is based on a full-field measurement using two-dimensional digital image correlation (DIC) technology. Its outstanding advantage is that it allows users to take measurements in a reliable plane-to-plane manner. Combined with a digital microscope, the resolution of the measurement can reach micrometer level. The method also provides a measure of parallelism error between the stages, used to compensate for the initially measured synchronization error results. In order to demonstrate the method's capabilities, a test case was carried out. In addition, the results obtained through DIC were statistically analyzed to improve their reliability. The final results indicated that this method is successful in the characterization of the position synchronization error. (C) 2020 Optical Society of America