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论文类型：期刊论文

发表时间：2009-07-01

发表刊物：Conference on Plasma-Based Surface Modification and Treatment Technologies

收录刊物：SCIE、EI、CPCI-S

卷号：37

期号：7,SI

页面范围：1123-1126

ISSN号：0093-3813

关键字：Interior surface; ion implantation; particle in cell (PIC); plasma processing and deposition

摘要：Plasma immersion ion implantation can be used to process the interior surfaces of oddly shape structures, such as a cylindrical bore. A small cylindrical bore with a grounded non-coaxial parallel auxiliary electrode is modeled using a 2-D particle-in-cell model. Simulation shows that, after the ions initially present in the bore begin to be exhausted, an ion density pulse is formed, which sweeps the interior surface of the bore. Moreover, a corresponding ion dose peak sweeps along the surface from the point nearest to the auxiliary electrode to a point further than the auxiliary electrode if the negative pulse is maintained at the bore. A nonuniform ion implantation on the inner surface of the bore is caused by the deviation of the noncoaxial parallel auxiliary electrode from the axis of the bore after all the ions in the bore have been exhausted.