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论文类型：期刊论文

发表时间：2017-03-01

发表刊物：CHINESE PHYSICS B

收录刊物：SCIE、EI

卷号：26

期号：3

ISSN号：1674-1056

关键字：gas heating; pulse-modulated rf discharge; atmospheric pressure glow discharge

摘要：The gas heating mechanism in the pulse-modulated radio-frequency (rf) discharge at atmospheric pressure was investigated with a one-dimensional two-temperature fluid model. Firstly, the spatiotemporal profiles of the gas temperature (T-g) in both consistent rf discharge and pulse-modulated rf discharge were compared. The results indicated that T-g decreases considerably with the pulse-modulated power, and the elastic collision mechanism plays a more important role in the gas heating change. Secondly, the influences of the duty cycle on the discharge parameters, especially on the T-g, were studied. It was found that T-g decreases almost linearly with the reduction of the duty cycle, and there exists one ideal value of the duty cycle, by which both the T-g can be adjusted and the glow mode can be sustained. Thirdly, the discharge mode changing from a to g mode in the pulse-modulated rf discharge was investigated, the spatial distributions of T-g in the two modes show different features and the ion Joule heating is more important during the mode transition.