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论文类型：期刊论文

发表时间：2009-12-01

发表刊物：PLASMA SCIENCE & TECHNOLOGY

收录刊物：SCIE、EI、Scopus

卷号：11

期号：6

页面范围：693-698

ISSN号：1009-0630

关键字：atmospheric pressure plasma jets; radio frequency discharge; electron density

摘要：An indirect method for measuring the electron density of radio frequency atmospheric pressure plasma jets (RF-APPJ) based on the discharge voltage and current wave forms is presented. An equivalent circuit of the plasma discharge is assumed by taking into account the electrode capacitance, serial resistance and inductance of the bulk plasma, as well as the sheath impedance. Based on the circuit model, the electron density can be obtained according to Ohm's law. By using this method, the effects of the electrode shape and discharge gap on the electron density are discussed.