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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 《Plasma Science and Technology》学术期刊编委
性别：男
毕业院校：大连工学院
学位：硕士
所在单位：物理学院
学科：等离子体物理
办公地点：主楼东侧楼（物理系楼）304室
联系方式：0411-84707981
电子邮箱：wangdez@dlut.edu.cn
A theoretical model for neutral velocity distributions at a planar target in plasma source ion implantation
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论文类型：期刊论文
发表时间：1999-04-15
发表刊物：JOURNAL OF APPLIED PHYSICS
收录刊物：Scopus、SCIE
卷号：85
期号：8
页面范围：3949-3951
ISSN号：0021-8979
摘要：A theoretical model is developed to study the velocity distributions of neutrals striking a planar target in plasma source ion implantation (PSII) for the case in which the pressure of the gas is large enough that the fast neutrals can be produced in the sheath by ion-neutral charge exchange collisions. An analytic expression for the neutral velocity distribution at the target is provided. The theoretic results agree with Monte Carlo simulations. (C) 1999 American Institute of Physics. [S0021-8979(99)03008-X].