王德真

个人信息Personal Information

教授

博士生导师

硕士生导师

任职 : 《Plasma Science and Technology》学术期刊编委

性别:男

毕业院校:大连工学院

学位:硕士

所在单位:物理学院

学科:等离子体物理

办公地点:主楼东侧楼(物理系楼)304室

联系方式:0411-84707981

电子邮箱:wangdez@dlut.edu.cn

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ELECTRON-ENERGY DISTRIBUTIONS AND KINETIC TEMPERATURES IN HIGH-FREQUENCY ARGON DISCHARGES

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论文类型:期刊论文

发表时间:1993-01-14

发表刊物:JOURNAL OF PHYSICS D-APPLIED PHYSICS

收录刊物:SCIE、Scopus

卷号:26

期号:1

页面范围:62-65

ISSN号:0022-3727

摘要:The electron energy distribution functions and kinetic temperatures in argon discharges at low pressures under the action of a uniform high-frequency electric field are calculated by numerically solving the homogeneous Boltzmann equation. The calculation covers the whole range from low electron densities to sufficiently high electron densities. The influence of electron-electron collisions on the electron energy distribution functions and kinetic temperatures for various amplitudes and frequencies of the HF electric field and degrees of ionization is investigated.