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论文类型：期刊论文

发表时间：2013-11-01

发表刊物：2nd International Conference on Engineering and Technology Innovation (ICETI)

收录刊物：Scopus、CPCI-S、EI、SCIE

卷号：19

期号：11,SI

页面范围：1845-1850

ISSN号：0946-7076

摘要：We present a new method to fabricate one-dimensional (1D) nanochannels on a thermoplastic substrate. This method has two main steps. First, a mold with microscale features is used to replicate microchannels on a thermoplastic substrate. Second, the fabricated microchannel is compressed to a 1D nanochannel at a temperature above the glass transition temperature (T-g) of the themoplastics. The effects of compression temperature, compression pressure, retaining time and loading rate on microchannel compression have been studied. Results have shown that a 1D nanochannel of 1-30 mu m wide and 200-300 nm deep can be readily fabricated by using this method.