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论文类型：期刊论文

发表时间：2006-09-03

发表刊物：5th Asian Meeting on Ferroelectrics (AMF-5)

收录刊物：SCIE、EI、CPCI-S、Scopus

卷号：358

期号：1 PART 4

页面范围：904-+

ISSN号：0015-0193

关键字：thin film; micro force sensor; calibration

摘要：Calibration of the micro force sensors is necessary for the measurement of microNewton,forces, which ore critical to analytical applications of micro force sensor in the analysis of micromanipulators, microrobots and microgrippers. This paper proposes a novel calibration system to calibrate PZT thin film micro force sensor using the bimorph probe as the loading part. Sensitivities of PZT thin film micro force sensors were calibrated by the calibration system composed of the drive system and the testing system. The drive system combines 3-dimensional positioning stage, a bimorph probe and a frequency synthesizer, and the testing system combines an electronic balance,for static state or a charge amplifier and a lock-in amplifier for the quasi static state.