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论文类型：会议论文

发表时间：2007-06-10

收录刊物：Scopus、CPCI-S、EI

页面范围：2255-2258

关键字：piezoelectric microcantilever; PZT thin film; microsensor; microactuator

摘要：The paper presents a technology platform for micromanipulation systems based on the piezoelectric cantilevers integrated with PZT thin-film microforce sensors and actuators. Two novel piezoelectric microcantilevers with two-segment and bimoroh sol-gel PZT films were designed, fabricated by bulk micromachining and tested. The sensing and actuation capability of two-segment PZT microcantilevers as microforce sensors or actuators was characterized. The sensing performance of bimorph PZT microcanti levers was compared with the conventional unimorph microcantilever. The piezoelectric constant d(31) of PZT films were measured without poling process.