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论文类型：期刊论文

发表时间：2006-12-01

发表刊物：6th East Asian Conference on Chemical Sensors (EACCS-6)

收录刊物：SCIE、CPCI-S、PKU、ISTIC

卷号：35

页面范围：436-438

ISSN号：1002-185X

关键字：tactile sensor; piezoelectric; edoscopic grasper

摘要：This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor, which can be integrated on to the endoscopic grasper used in minimally invasive surgery (MIS). The sensor includes a silicon substrate, platinum bottom electrode, platinum top electrode, and a ZnO piezoelectric thin film, which is sandwiched between the two-electrode layers. The sensitivity of the micro-force sensor is analyzed in theory and the sensor exhibits high sensitivity about 7 pc/uN. The application of this tactile sensor to MIS will allow the surgeon feeling the touch force between the endoscopic grasper and tissue in real-time, and manipulating the tissue safely.