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论文类型：会议论文

发表时间：2005-01-01

收录刊物：CPCI-S

页面范围：8753-8756

关键字：microstructure; dynamic characteristic; dynamic test; MEMS

摘要：To study the dynamic characteristics of micro inertial components under high load, the dynamical equation including the effect of dead load is discussed based on the Hamilton's principle. A typical micro inertial component - micro cantilever is studied. The differences of the governing equations with and without dead load are compared. The effects of inertial force under high load on the natural frequency of micro beam are analyzed with finite-element method (FEM). From the FEM equation, it can be found that the whole stiffness increases caused by the load-induced stiffness and thus the natural frequency of the micro beam becomes higher. The natural frequencies of micro cantilever were calculated with different inertial force using the ANSYS software. The results show that the natural frequency of micro cantilever gets higher as the inertial force increases. To prove the above work, dynamic testing device for experiment is designed. The high g-force acceleration is obtained from high-speed centrifugal revolving table and piezoelectric ceramic is used as piezo-actuator to excite the microstructures. Laser Doppler vibrometer (LDV) is chosen for non-contact vibration measurement. The vibration dynamic signals are transmitted from the revolving table to the vibrometer by a fiber optic rotary joint, and processed by LDV.