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论文类型：期刊论文

发表时间：2010-03-01

发表刊物：JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

收录刊物：SCIE、EI

卷号：210

期号：4

页面范围：696-702

ISSN号：0924-0136

关键字：Filling modes; Submicron and nano-scale; Glassy polymer; Dual-peak filling

摘要：In (his Study, we used a glass mold coated with TiN layer to fabricate submicron and nano-gratings on a PMMA (polyrnethylinethacrylate) film The cavities on the mold, with sizes varying from 71 nm to 980nm, was etched by ion beam The deformation and filling modes of polymer during fabrication modes of were Studied Dual-peak deformations, which were considered as the characteristic filling modes of "viscous-dominant" polymer. were observed Because our fabrication experiments were conducted near the glass transition temperature (T(g)) of PMMA at which the polymer was "elastic-plastic-dominant", (lie appearance of the dual-peak filling mode meant solid-state polymer might exhibit some characters of fluidic polymer at submicion and nano-scale In addition, we presented a simple and effective mold release process at the end of this paper. which Could reduce defects during molding release process (C) 2009 Elsevier B.V. All rights reserved