Journal:真空科学与技术学报
ISSN No.:1672-7126
Key Words:High-power microwave source; Laser thermal shock; Outgassing; SiC
CN No.:11-5177/TB
Date of Publication:2024-11-20
Next One:Significant enhancment of the accuracy of impurity determination in vacuums using classification one-point laser-induced breakdown spectroscopy
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