Date of Publication:2024-10-07
Journal:SSRN
ISSN:1556-5068
Key Words:Atmospheric pressure; Cold plasmas; Cracks; Crystal material; Crystal orientation; Ductile fracture; Fracture mechanics; High hardness; Machined surface; Material removal behaviours; Microscopic cracks; Monocrystalline silicon; Removal behavior; Scratching; Silicon wafers; Single crystals; Single crystal silicon; Sub; surface damage
Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Academic Titles:创新创业学院院长
Gender:Male
Alma Mater:大连理工大学
Degree:Doctoral Degree
School/Department:创新创业学院
Discipline:Mechanical Manufacture and Automation. Materials Surface Engineering. Plasma physics. Biomedical Engineering
Business Address:机械新大楼
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