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Influence of cold plasma on material removal behavior during diamond grit scratching single crystal silicon

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Date of Publication:2024-11-15

Journal:Colloids and Surfaces A: Physicochemical and Engineering Aspects

Issue:P1

ISSN:0927-7757

Key Words:Anisotropy; Cold plasma; Diamond grit; Removal behavior; Scratching; Single crystal silicon

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Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Academic Titles:创新创业学院院长

Gender:Male

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:创新创业学院

Discipline:Mechanical Manufacture and Automation. Materials Surface Engineering. Plasma physics. Biomedical Engineering

Business Address:机械新大楼

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