韩秀友

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教授

博士生导师

硕士生导师

主要任职:光电工程与仪器科学学院副院长

性别:男

毕业院校:中国科学院上海光学精密机械研究所

学位:博士

所在单位:光电工程与仪器科学学院

学科:光学工程. 测试计量技术及仪器. 通信与信息系统

联系方式:电话:0411-84706251

电子邮箱:xyhan@dlut.edu.cn

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A PSQ-L Polymer Microring Resonator Fabricated by a Simple UV-Based Soft-Lithography Process

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论文类型:期刊论文

发表时间:2009-09-15

发表刊物:IEEE PHOTONICS TECHNOLOGY LETTERS

收录刊物:SCIE、EI、Scopus

卷号:21

期号:18

页面范围:1323-1325

ISSN号:1041-1135

关键字:Imprint; microring resonator; polymer waveguides

摘要:Photonic integrated circuits based on polymer waveguides have great potential as low-cost optical devices. A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining the waveguides and for use as both core and cladding layer for the waveguides. The waveguide circuits are replicated by a simple ultraviolet-based soft lithography method consisting of two steps. All-polymer microring resonators are fabricated by this approach and characterized. About 6-dB extinction ratio at the through port and 18-dB extinction ratio at the drop port is demonstrated. A Q-factor of 4.2 x 10(4) is obtained. Extracted from the measured spectrum, the scattering loss of the ring waveguides is estimated to be about 1.6 dB/cm. This easy fabrication technique can be easily extended to fabricate other devices.