骆英民

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工程师

性别:男

毕业院校:大连理工大学

学位:博士

所在单位:集成电路学院

学科:微电子学与固体电子学

办公地点:开发区校区教学楼C区505

联系方式:0411-62273207

电子邮箱:ymluo@dlut.edu.cn

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Growth and characterization of VO2/p-GaN/sapphire heterostructure with phase transition properties

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论文类型:期刊论文

发表时间:2015-12-01

发表刊物:APPLIED SURFACE SCIENCE

收录刊物:SCIE、EI、Scopus

卷号:357

页面范围:282-286

ISSN号:0169-4332

关键字:Vanadium oxide; p-GaN; Pulsed laser deposition; Phase transition

摘要:High quality pure phase VO2 films were deposited on p-GaN/sapphire substrates by pulsed laser deposition (PLD). A well-defined interface with dense and uniform morphology was observed in the as-grown VO2/p-GaN/sapphire heterostructure. The X-ray photoelectron spectroscopy (XPS) analyses confirmed the valence state of vanadium (V) in VO2 films was principally composed of V4+ with trace amount of V5+, no other valence state of V was detected. Meanwhile, a distinct reversible semiconductor-to-metal (SMT) phase transition with resistance change up to nearly three orders of magnitude was observed in the temperature dependent electrical resistance measurement, which was comparable to the high quality VO2 film grown directly on sapphire substrates. Our present findings will give a deeper insight into the physical mechanism behind the exotic characteristics of VO2/p-GaN heterostructure, and further motivate research in novel devices with combined functional properties of both correlated oxide and wide bandgap nitride semiconductors. (C) 2015 Elsevier B.V. All rights reserved.