骆英民

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工程师

性别:男

毕业院校:大连理工大学

学位:博士

所在单位:集成电路学院

学科:微电子学与固体电子学

办公地点:开发区校区教学楼C区505

联系方式:0411-62273207

电子邮箱:ymluo@dlut.edu.cn

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Room temperature electroluminescence from the ZnO homojunction grown on an n(+)-Si substrate by metal-organic chemical vapor deposition

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论文类型:期刊论文

发表时间:2008-02-01

发表刊物:SEMICONDUCTOR SCIENCE AND TECHNOLOGY

收录刊物:SCIE、EI

卷号:23

期号:2

ISSN号:0268-1242

摘要:ZnO film was grown on a heavily phosphor-doped n(+)-Si substrate by metal-organic chemical vapor deposition technology. X-ray photoelectron spectroscopy measurements indicate that a two-layer structure, comprised of a phosphor-doped ZnO layer and an un-doped ZnO layer, was formed during the diffusion process of phosphor from the n(+)-Si substrate. The current-voltage characteristic exhibited significant rectifying behavior with low-leakage current for this device. The distinct defect-related blue-white electroluminescence was observed, the origin of which was confirmed to be from the ZnO p-n homojunction.