大连理工大学主页平台管理系统 YongXin Liu--yxliu-- 射频感应耦合等离子体对材料表面上原子再复合行为的影响

Research Projects

Current location: yxliu >> Scientific Research >> Research Projects

射频感应耦合等离子体对材料表面上原子再复合行为的影响

Hits:

Leading Scientist:Fei Gao

Project Participants:Zhang YuRu,YongXin Liu

Supported by:国家自然科学基金项目

Sub-Class of Project:青年科学基金项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:11205025

Date of Project Approval:2012-09-25

Scheduled completion time:2015-12-31

Date of Project Initiation:2013-01-01

Pre One:脉冲调制等离子体增强原子层刻蚀多尺度研究

Next One:低气压电负性射频容性放电的条纹不稳定性研究

Personal information

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Male

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室

Click:

Open time:..

The Last Update Time:..