大连理工大学主页平台管理系统 YongXin Liu--yxliu-- Experimental investigations of the plasma radial uniformity in single and dualfrequency capacitively coupled argon discharges

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Experimental investigations of the plasma radial uniformity in single and dualfrequency capacitively coupled argon discharges

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Indexed by:期刊论文

Date of Publication:2016-01-01

Journal:Phys. Plasmas

Volume:23

Issue:12

Page Number:123512-123512

Pre One:Determination of neutral temperature using fiber Bragg grating sensor in capacitively coupled argon plasmas

Next One:低气压射频容性耦合等离子体中的电子加热机制

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Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Male

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室

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