大连理工大学主页平台管理系统 YongXin Liu--yxliu-- Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges

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Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges

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Indexed by:期刊论文

Date of Publication:1993-01-01

Journal:PLASMA SOURCES SCIENCE & TECHNOLOGY

Volume:22

Issue:2

Page Number:25012-25012

Pre One:Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique

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Gender:Male

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:物理学院

Discipline:Plasma physics

Business Address:大连理工大学三束材料改性教育部重点实验室3号楼201室

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