Indexed by:期刊论文

Date of Publication:2011-07-27

Journal:PHYSICAL REVIEW LETTERS

Included Journals:Scopus、SCIE、EI、PubMed

Volume:107

Issue:5

Page Number:055002

ISSN No.:0031-9007

Abstract:We present the experimental evidence of the collisionless electron bounce resonance heating (BRH) in low-pressure dual-frequency capacitively coupled plasmas. In capacitively coupled plasmas at low pressures when the discharge frequency and gap satisfy a certain resonant condition, the high energy beamlike electrons can be generated by fast sheath expansion, and heated by the two sheaths coherently, thus the BRH occurs. By using a combined measurement of a floating double probe and optical emission spectroscopy, we demonstrate the effect of BRH on plasma properties, such as plasma density and light emission, especially in dual-frequency discharges.