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性别: 男

毕业院校: 大连理工大学

学位: 博士

所在单位: 物理学院

学科: 等离子体物理

办公地点: 大连理工大学三束材料改性教育部重点实验室3号楼201室

电子邮箱: yxliu129@dlut.edu.cn

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当前位置: Yong >> 科学研究 >> 论文成果
Experimental Observation and Computational Analysis of Striations in Electronegative Capacitively Coupled Radio-Frequency Plasmas

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论文类型: 期刊论文

发表时间: 2016-06-21

发表刊物: PHYSICAL REVIEW LETTERS

收录刊物: SCIE、EI、PubMed

卷号: 116

期号: 25

页面范围: 255002

ISSN号: 0031-9007

摘要: Self-organized spatial structures in the light emission from the ion-ion capacitive rf plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving radio frequency and the eigenfrequency of the ion-ion plasma (derived from an analytical model) that establishes a modulation of the electric field, the ion densities, as well as the energy gain and loss processes of electrons in the plasma. The growth of the instability is followed by the numerical simulations.

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