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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：吉林大学
学位：博士
所在单位：物理学院
电子邮箱：baiyz@dlut.edu.cn
Tuning bond contents in B-C-N films via temperature and bias voltage within RF magnetron sputtering
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论文类型：期刊论文
发表时间：2009-12-15
发表刊物：SURFACE & COATINGS TECHNOLOGY
收录刊物：SCIE、EI、Scopus
卷号：204
期号：5
页面范围：713-717
ISSN号：0257-8972
关键字：Magnetron sputtering; Bond content; BCN
摘要：Using radio frequency reactive magnetron sputtering technique with boron and graphite targets, amorphous B-C-N films were synthesized on the silicon (100) substrate applied with different temperatures and bias voltages. The structural and bonding characteristics of the synthesized films were characterized by Fourier transform infrared spectroscopy (FTIR) and X-ray phortoelectron spectroscopy (XPS). The bond contents in the B-C-N films show remarkable dependence on the bias voltage applied to the substrate at 400 degrees C. (C) 2009 Elsevier B.V. All rights reserved.