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论文类型：期刊论文

发表时间：2016-08-01

发表刊物：PHYSICS OF PLASMAS

收录刊物：SCIE、EI、Scopus

卷号：23

期号：8

ISSN号：1070-664X

摘要：The overshoot and undershoot of the applied voltage on the electrodes, the discharge current, and radio frequency (RF) power were observed at the initial phase of pulse-modulated (PM) RF atmospheric pressure discharges, but factors influencing the overshoot and undershoot have not been fully elucidated. In this paper, the experimental studies were performed to seek the reasons for the overshoot and undershoot. The experimental results show that the overshoot and undershoot are associated with the pulse frequency, the rise time of pulse signal, and the series capacitor C-s in the inversely L-shaped matching network. In the case of a high RF power discharge, these overshoot and undershoot become serious when shortening the rise time of a pulse signal (5 ns) or operating at a moderate pulse frequency (500 Hz or 1 kHz). Published by AIP Publishing.