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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：中科院等离子体物理研究所
学位：博士
所在单位：物理学院
学科：等离子体物理
办公地点：新三束实验室3号楼
联系方式：zfding@dlut.edu.cn
电子邮箱：zfding@dlut.edu.cn
The resonant radio-frequency magnetic probe tuned by coaxial cable
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论文类型：期刊论文
发表时间：2012-08-01
发表刊物：REVIEW OF SCIENTIFIC INSTRUMENTS
收录刊物：SCIE、EI、PubMed
卷号：83
期号：8
页面范围：085112
ISSN号：0034-6748
摘要：In this paper, the resonant rf magnetic probe is upgraded by replacing the rotary capacitor in the old version with the series-connected coaxial cable. The numerical calculation and the measurement with the prototype probe show that the rf magnetic probe can achieve resonance at a middle length of the series-connected coaxial cable. The good electrical symmetry of the new rf magnetic probe is ensured by both the identity of series-connected coaxial cables and the new structure of the primary winding. Practical measurements conduced on an rf inductively coupled plasma source demonstrate that performances of the new rf magnetic probe are good. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4746995]