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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：中科院等离子体物理研究所
学位：博士
所在单位：物理学院
学科：等离子体物理
办公地点：新三束实验室3号楼
联系方式：zfding@dlut.edu.cn
电子邮箱：zfding@dlut.edu.cn
Attachment Instabilities of SF6 Inductively Coupled Plasmas under Different Coupling Intensities
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论文类型：期刊论文
发表时间：2009-06-01
发表刊物：CHINESE PHYSICS LETTERS
收录刊物：SCIE、ISTIC
卷号：26
期号：6
ISSN号：0256-307X
摘要：Characteristics of attachment instabilities in SF6 inductively coupled plasmas are experimentally studied under different coupling intensities. Experimental results show that the instabilities only occur in.. modes operating in positive feedback regions. Both the sudden mode transitions and the instabilities are influenced by the coupling intensities. With increasing absorbed power, weak and middle coupling discharges can sequently undergo sudden mode transitions and attachment instabilities. In strong coupling discharges, the sudden mode transitions disappear and only attachment instabilities exist. The strong and weak coupling discharges are the most stable and unstable, respectively.