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论文类型：期刊论文

发表时间：2022-06-29

发表刊物：物理学报

卷号：59

期号：4

页面范围：2653-2660

ISSN号：1000-3290

摘要：The characteristics of the radio frequency plasma jets at atmospheric pressure in Ar/SiCl_4/H_2 gas mixture were studied in this paper by using optical emission spectroscopy.Firstly,the electron excitation temperature of plasmas was calculated from the Si atom spectral emission using Bohzmann plots,and then,based on the temperature,the number density of the Si atoms in the plasmas and the dissociation ratio of the SiCl_4 were estimated.Finally,the dependence of the excitation temperature,the number density of the Si atoms and the dissociation ratio of the SiCl_4 on the discharge power and the gas flow rate were presented.

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