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论文类型： 期刊论文

发表时间： 2012-12-01

发表刊物： JOURNAL OF PLASMA PHYSICS

收录刊物： Scopus、SCIE、EI

卷号： 78

期号： 6

页面范围： 673-676

ISSN号： 0022-3778

摘要： A one-dimensional fluid model is built to study the effect of radio frequency (RF) on the characteristics of RF nitrogen discharge with induced argon plasma at high pressure. The model is solved by a finite difference method, and the numerical results are obtained. The numerical results show that by modulating driven frequency, the discharge can obtain higher plasma density. Moreover, the discharge is operated in a stable a mode in a range of 100 MHz of driven frequency.