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Indexed by:期刊论文

Date of Publication:2018-08-15

Journal:SENSORS AND ACTUATORS A-PHYSICAL

Included Journals:SCIE

Volume:279

Page Number:107-112

ISSN No.:0924-4247

Key Words:Cantilever microphone; Fabry-Perot interferometer; Fiber-optic sensor; Laser micro-machining

Abstract:We demonstrate a high sensitive cantilever microphone based on fiber-optic Fabry-Perot interferometer. A stainless steel cantilever is manufactured by laser micro-machining technique. The size of the cantilever is 2 mm x 1 mm, and the thickness is 10 mu m. The air gap between the fiber endface and the cantilever forms the Fabry-Perot cavity. Acoustic sensing test demonstrates high sensitivities in the frequency range from 100 Hz to 3 kHz. The pressure sensitivity and the noise-limited minimum detectable acoustic pressure level are measured to be 364 nm/Pa and 8.5 mu Pa/Hz(1/2) at the frequency of 1 kHz, respectively. The Fabry-Perot interferometer based cantilever microphone shows advantages of high sensitivity, small size, easy to install and immune to electromagnetic interference. (C) 2018 Elsevier B.V. All rights reserved.