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基于全石英结构非本征型温度不敏感的光纤压力传感器

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Date of Publication:2012-01-01

Journal:新型工业化

Issue:4

Page Number:44-49

Abstract:A novel high sensitivity pressure sensor based on all-fused-silica Extrinsic Fabry-Pérot optical fiber interferometer, which exhibits extreme low temperature dependence, has been developed. The sensor can excellently operate with a sensitivity of 5.18nm/KPa (0.75nm/psi), a resolution of 38Pa (0.005psi). Due to epoxy-free bonding and reserving a vent hole between the fiber and the ferrule in the process of laser heating fusion bonding, the temperature dependence is significantly reduced to the 0.011nm/℃, and pressure measurement error is 0.021KPa/℃ (0.003psi/℃). The operating point doesn’t shift with backpressure change due to the vent hole. The sensor may be suitable for liquid measurement, environmental monitoring and other industrial applications in harsh environment.

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