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Date of Publication:2012-01-01
Journal:新型工业化
Issue:4
Page Number:44-49
Abstract:A novel high sensitivity pressure sensor based on all-fused-silica Extrinsic Fabry-Pérot optical fiber interferometer, which exhibits extreme low temperature dependence, has been developed. The sensor can excellently operate with a sensitivity of 5.18nm/KPa (0.75nm/psi), a resolution of 38Pa (0.005psi). Due to epoxy-free bonding and reserving a vent hole between the fiber and the ferrule in the process of laser heating fusion bonding, the temperature dependence is significantly reduced to the 0.011nm/℃, and pressure measurement error is 0.021KPa/℃ (0.003psi/℃). The operating point doesn’t shift with backpressure change due to the vent hole. The sensor may be suitable for liquid measurement, environmental monitoring and other industrial applications in harsh environment.
Note:新增回溯数据