Parylene-C diaphragm-based fiber-optic Fabry-Perot acoustic sensor for trace gas detection
Release Time:2023-11-06 Hits:
Date of Publication: 2022-10-07
Journal: 2017 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY ADVANCED OPTICAL SENSORS AND APPLICATIONS
Institution: 光电工程与仪器科学学院
Volume: 10618
ISSN: 0277-786X