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Wide-Range Displacement Sensor Based on Fiber-Optic Fabry-Perot Interferometer for Subnanometer Measurement

Release Time:2023-11-06  Hits:

Date of Publication: 2022-10-03

Journal: IEEE SENSORS JOURNAL

Institution: 光电工程与仪器科学学院

Volume: 11

Issue: 7

Page Number: 1602-1606

ISSN: 1530-437X

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